He will be firm favourite and is still yet to drop a set this tournament, although Berdych presented him with one of his toughest challenges of so far.
The Czech, who has twice before beaten Federer on the grass of SW19, was broken early in the opening set but fought back strongly to break himself and force a tie-break that Federer edged 7-4.
No breaks of serve in the second set meant another tie-break and again the outcome was identical, the Swiss edging the breaker by an identical scoreline.
This seemed a different Berdych than previously, the Czech muttering to himself and closing his eyes with intense focus between games with the clear belief that he could win. And he also had his chances in the third with break points on the Federer serve in the sixth game, saved with sublime serving from the Swiss maestro.
It was the last roll of the dice for the 2010 runner-up, Federer gaining the critical break in the seventh game before serving out to seal his place in the final.
Should Federer beat Cilic on Sunday, he will lift his eighth Wimbledon title, eclipsing one of his own idols, Pete Sampras, who Federer himself beat here back in 2001.
"I feel very privileged to be in another final," Federer, who received a standing ovation at the end, said.
I've got the pleasure to play on Centre Court another time. I can't believe it's almost true again.
"I'm happy to have a day off to reflect on what I've done at the tournament."